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confovis LV200/LV300 3D 表面轮廓仪

confovis LV200/LV300 3D 表面轮廓仪 产品名称: 3D 表面轮廓仪
产品型号: LV200/LV300
厂商名称: Confovis
服务类型: 购买
市场参考价: 联系业务员
产品简述: LV200和LV300系列可以满足半导体工业对晶圆片精细测量的要求,测量范围可达200mm或300mm。它可以完成粗糙度、体积、纳米尺度下的深度测量,由于采用独特的非共聚焦成像技术,在保证高精度的前提下降低了对环境震动的要求。
详细描述 关联选件 关联配件 资料下载 应用方案 优惠促销

BENEFITS
? Fast 3D analysis: The measurement is completed very quickly. With high lateral and depth resolution, the ConfoCam C1+ needs less than half a minute for a typical surface scan.
? Highly precise measurements within minimum time
Z resolution: 1 nm*
Repeatability (1 Sigma): 0,3% for LV150 with piezo stage; 0,8% for L200/L300 with encoder
Measuring range: 250μm/30mm** for LV150; 25mm for L200/L300 and Portalsystem.
? Intelligent Objective Revolver
? Reliably Software based on MountainsMap?
The software offers you extensive presentation functions from the height profile to the tiltable 3D real image.
? Special Software Functions
By means of several adjacent measuring fields, the total measuring field can be enlarged for the highly precise measurement of large areas. In the standard system, areas up to an edge length of 19 mm are possible.
? Micro Positioning Systems
? Microscope components from NIKON
Bright and/or dark field illumination
Polarisation and DICT filter
Transmitted light applications (L200/L300 and portal solutions)
Use of wide-range lenses (long working-distance lenses)
? Maintenance-free scan head / high vibration resistance

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